화합물반도체
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PVT Grower - 8inch(SiC)
Grower for 8inch PVT(SiC)
| Dimension | 2,000 x 2,000 x 4,065(mm3) |
|---|---|
| Weight(total) | About 3ton |
| Output Voltage | 80kW, 3phase 380V 50/60Hz 90kVA |
| Atmosphere | Ar, N2 |
| Max Temp. | 2,500°C(Max) |
| Hot Zone Control | Auto temperature controller(for RF output) (1) : Work coil position controller (2) : Speed control range (fast : 0.1 ~ 300mm/sec) (slow : 0.001 ~ 3mm/h) (3) : Moving range : ± 75mm |
| Reactor | Air cooling type |
| Heating Coil | OD430 x ID410 x H570, Turn : 13(Pitch 37) |
| Frequency | 8kHz(3-10kHz) |
| Crucible Rotation | 0.1 - 30rpm(Max) |
| Vacuum System | P < 5.0×10-4Pa(no load, room Temp.) |
| Pressure Control Range | 0.1 - 100kPa |
| Leak Rate | Below 5×10-8Pa, m3/sec(He) |
