SS4B Ingot Grower (Semiconductor)


SS4B Ingot Grower (Semiconductor)
Function | SS4B |
---|---|
Typical Ingot Diameter | 12inch Semiconductor Grower Superconducting Magnet Type |
Maximum Charge Amount | 440 kg |
Hot Zone Size | Normal 32inch |
Maximum Crystal Length | Approx. 2000mm |
Pull Chamber Length | 3000 or 3500mm |
Seed Pulling Speed (slow) | 0.10~6.00mm/min |
Seed Pulling Speed (fast) | 1200mm/min |
Seed Rotating Speed | 1.00~20.00rpm/Accuracy : 1% |
Crucible Lifting Speed (fast, slow) | Slow 0.01~1.00mm/min, Fast 260mm/min |
Crucible Lifting Capacity | Approx. 1000kg |
Crucible Rotating Speed | 0.10~20.00 rpm |
Crucible Lifting Stroke | Available up to 750mm |
Chamber Materials | Inside : SUS316L |
Outside : SUS304 | |
Maximum Height | Approx. 10,500mm |
Ar Pressure / Flow | 2~3kg/㎠, Max. flow : 200LPM |
Air Pressure (Valve control) | 4~6kg/㎠, Max. flow : 100LPM |
Cooling Water Pressure | 2~3kg/㎠, Max 5kg/㎠ |
Water Consumption | Approx. 600~700LPM |
Cooling Water Inlet Temp | Customer's Spec |
Power Supply Maximum Power | Side heater 180kW/Bottom heater 50kW (IGBT/Option) |
Dust Filter Housing | Metal Filter (Option) |