SS4B Ingot Grower (Semiconductor)
SS4B Ingot Grower (Semiconductor)
| Function | SS4B |
|---|---|
| Typical Ingot Diameter | 12inch Semiconductor Grower Superconducting Magnet Type |
| Maximum Charge Amount | 440 kg |
| Hot Zone Size | Normal 32inch |
| Maximum Crystal Length | Approx. 2000mm |
| Pull Chamber Length | 3000 or 3500mm |
| Seed Pulling Speed (slow) | 0.10~6.00mm/min |
| Seed Pulling Speed (fast) | 1200mm/min |
| Seed Rotating Speed | 1.00~20.00rpm/Accuracy : 1% |
| Crucible Lifting Speed (fast, slow) | Slow 0.01~1.00mm/min, Fast 260mm/min |
| Crucible Lifting Capacity | Approx. 1000kg |
| Crucible Rotating Speed | 0.10~20.00 rpm |
| Crucible Lifting Stroke | Available up to 750mm |
| Chamber Materials | Inside : SUS316L |
| Outside : SUS304 | |
| Maximum Height | Approx. 10,500mm |
| Ar Pressure / Flow | 2~3kg/㎠, Max. flow : 200LPM |
| Air Pressure (Valve control) | 4~6kg/㎠, Max. flow : 100LPM |
| Cooling Water Pressure | 2~3kg/㎠, Max 5kg/㎠ |
| Water Consumption | Approx. 600~700LPM |
| Cooling Water Inlet Temp | Customer's Spec |
| Power Supply Maximum Power | Side heater 180kW/Bottom heater 50kW (IGBT/Option) |
| Dust Filter Housing | Metal Filter (Option) |
